Freescale SemiconductorTechnical Data
MPXM2051GRev 1, 09/2005
50 kPa On-Chip TemperatureCompensated and CalibratedSilicon Pressure Sensors
The MPXM2051G device is a silicon piezoresistive pressure sensor providing a highly accurate and linear voltage output - directly proportional to the applied pressure. The sensor is a single, monolithic silicon diaphragm with the strain gauge and a thin-film resistor network integrated on-chip. The chip is laser trimmed for precise span and offset calibration and temperature compensation.Features••••
Temperature Compensated Over 0°C to +85°CAvailable in Easy-to-Use Tape & ReelRatiometric to Supply VoltageGauge Ported
MPXM2051GSERIES
COMPENSATED AND CALIBRATED
PRESSURE SENSOR0 TO 50 kPA (0 TO 7.25 psi)40 mV FULL SCALE SPAN
(TYPICAL)
MPAK PACKAGESTypical Applications••••••
Pump/Motor ControllersRobotics
Level IndicatorsMedical DiagnosticsPressure Switching
Non-Invasive Blood Pressure Measurement
ORDERING INFORMATION
Device TypePorted
Options
Case No.
MPX SeriesOrder No.
Packing OptionsRails
Device MarkingMPXM2051G
12
MPXM2051GS/GST1CASE 1320A-02Pin Number
Gnd+Vout
34
VS-Vout
Absolute, Axial 1320AMPXM2051GSPort
Absolute, Element Only
1320AMPXM2051GST1
Tape & ReelMPXM2051G
Figure1 shows a block diagram of the internal circuitry on the stand-alone pressure sensor chip.
VS3
Thin FilmTemperatureCompensation
andCalibration
X-ducerSensingElement
24
Vout+Vout-
1GND
Figure1. Temperature Compensated Pressure Sensor Schematic
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VOLTAGE OUTPUT VERSUS APPLIED DIFFERENTIAL PRESSURE
The differential voltage output of the sensor is directly proportional to the differential pressure applied.Table1. Maximum Ratings(1)
Rating
Maximum PressureStorage TemperatureOperating Temperature
The output voltage of the differential or gauge sensor increases with increasing pressure applied to the pressure side relative to the vacuum side. Similarly, output voltage increases as increasing vacuum is applied to the vacuum side relative to the pressure side.
SymbolPmaxTstgTA
Value200-40 to +125-40 to +125
UnitkPa°C°C
1.Exposure beyond the specified limits may cause permanent damage or degradation to the device.
Table2. Operating Characteristics (VS = 10 Vdc, TA = 25°C.)
Characteristic
Pressure Range(1)Supply Voltage(2)Supply CurrentFull Scale Span(3)Offset(4)SensitivityLinearity(5)
Pressure Hysteresis(5) (0 to 50 kPa)
Temperature Hysteresis(5) (-40°C to +125°C)Temperature Effect on Full Scale Span(5)Temperature Effect on Offset(5)Input ImpedanceOutput Impedance
Response Time(6) (10% to 90%)Warm-UpOffset Stability(7)
1.1.0 kPa (kiloPascal) equals 0.145 psi.
2.Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional error due to device self-heating.
3.Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure.
4.Offset (Voff) is defined as the output voltage at the minimum rated pressure.5.Accuracy (error budget) consists of the following:•Linearity:••••
Output deviation from a straight line relationship with pressure, using end point method, over the specified pressure range.
Τemperature Hysteresis:Output deviation at any temperature within the operating temperature range, after the temperature is cycled to
and from the minimum or maximum operating temperature points, with zero differential pressure applied.
Pressure Hysteresis:Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
minimum or maximum rated pressure, at 25°C.
TcSpan:Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C.TcOffset:Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative
to 25°C.
SymbolPOPVSIoVFSSVoff∆V/∆P———TCVFSSTCVoffZinZouttR——
Min0——38.5-1.0—-0.3——-1.0-1.010001400———
Typ—106.040—0.8—±0.1±0.5————1.020±0.5
Max5016—41.51.0—0.3——1.01.025003000———
UnitkPaVdcmAdcmVmVmV/kPa%VFSS%VFSS%VFSS%VFSSmVΩΩmsms%VFSS
6.Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure.7.Offset stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
MPXM2051G2
Sensors
Freescale Semiconductor
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LINEARITY
Linearity refers to how well a transducer's output follows the equation: Vout = Voff + sensitivity x P over the operating pressure range. There are two basic methods for calculating nonlinearity: (1) end point straight line fit (see Figure2) or (2)a least squares best line fit. While a least squares fit gives
the “best case” linearity error (lower numerical value), the calculations required are burdensome.
Conversely, an end point fit will give the “worst case” error (often more desirable in error budget calculations) and the calculations are more straightforward for the user. The specified pressure sensor linearities are based on the end point straight line method measured at the midrange pressure.
Least Squares FitExaggerated PerformanceCurveRelative Voltage OutputLeastSquareDeviationStraight LineDeviationEnd Point Straight Line FitOFFSET050Pressure (% Fullscale)
100Figure2. Linearity Specification Comparison
ON-CHIP TEMPERATURE
COMPENSATION AND CALIBRATION
Figure3 shows the minimum, maximum and typical output characteristics of the MPXM2051G series at 25°C. The
output is directly proportional to the differential pressure and is essentially a straight line.
A silicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the silicon diaphragm.
4035Output (mVdc)302520151050-5
VS = 10 VdcTA = 25°C
TYP
MAXSPANRANGE(TYP)
MINkPaPSI
0
12.51.8253.637.55.4507.25
OFFSET(TYP)
Figure3. Output versus Pressure Differential
MPXM2051G
Sensors
Freescale Semiconductor
3
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PACKAGE DIMENSIONSPIN4PIN1PAGE 1 OF 2CASE 1320A-02ISSUE A
MPXM2051G4
Sensors
Freescale Semiconductor
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PACKAGE DIMENSIONSPAGE 2 OF 2CASE 1320A-02
ISSUE A
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Sensors
Freescale Semiconductor
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MPXM2051GRev. 109/2005
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