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专利名称：A method for manufacturing liquid jet
recording heads and a head manufacturedby such method of manufacture
发明人：Hasegawa, Toshinori c/o CANON KABUSHIKI
KAISHA,Inaba, Masaki c/o CANON
KABUSHIKI KAISHA,Saitoh, Akio c/o CANONKABUSHIKI KAISHA,Goto, Akira c/o CANONKABUSHIKI KAISHA,Furukawa, Masao c/oCANON KABUSHIKI KAISHA,Ishimatsu, Shinc/o CANON KABUSHIKI KAISHA,Ito, Miki c/oCANON KABUSHIKI KAISHA
申请号：EP98116118.5申请日：19980826公开号：EP0900660B1公开日：20031203
摘要：A method for manufacturing liquid jet recording heads, each provided withdischarge ports (2g) to discharge liquid, a discharge port plate (2b,21) having thedischarge ports arranged therefor, and performing ablation processing of holes
becoming the discharge ports by use of a mask (12) for projecting the image of the maskonto the discharge port plate with coherent laser beam (L) as light source, comprises thefollowing steps of forming water-repellent layer (22) on the surface of the discharge portplate (2b,21) on the liquid discharge side; and of performing the ablation processing byirradiating the laser beam from the reverse side of the surface of discharge port plate
having the water-repellent layer formed thereon in a state of such surface beingarranged to be under the atmosphere containing fluorine atom, and forming thedischarge ports, at the same time, enabling the substance containing the fluorine atomexcited by the laser beam (24) to adhere to the surface having the water-repellent layerformed thereon. In this manner, the throughput of product manufacture is enhancedwithout any provision of extra processing steps to remove the byproducts to be createdby the irradiation of laser beam, hence contributing to a significant cost reduction of themanufacture of liquid jet recording heads.
申请人：CANON KK
地址：JP
国籍：JP
代理机构：Pellmann, Hans-Bernd, Dipl.-Ing.
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